Gratings
Transmission and reflection gratings customized to any application
Customized gratings with features sizes from nanometres to micrometres
Custom transmission gratings for EUV and higher energy X-ray systems. Our direct-write, fast through-put process allows for high resolution gratings with areas that span several hundred micrometres to millimetres. Various metals can be fabricated on thin membranes of silicon nitride, silicon carbide, or silicon.
Device | Material | Thickness | Pitch | Lines/mm | Lines & Spaces / mm | Membrane | Area | Design Energy |
---|---|---|---|---|---|---|---|---|
500um-80nm-W | Tungsten | 100 nm | 80 nm | 25000 | 12500 | 50-100 nm silicon nitride | 500 μm x 500 μm | 200-1000 eV |
500um-80nm-W | Rutheniu | 55-150 nm | 40 nm | 50000 | 25000 | 50-100 nm silicon carbide | 500 μm x 500 μm | 20-1000 eV |
1000um-80nm-W | Tungsten | 100 nm | 80 nm | 25000 | 12500 | 50-100 nm silicon nitride | 1000 μm x 1000 μm | 200-1000 eV |
500um-50nm-Au | Gold | 150-200 nm | 50 nm | 40000 | 20000 | 50-100 nm silicon nitride or silicon carbide | 500 μm x 500 μm | 200-1500 eV |
1000um-50nm-Au | Gold | 150-200 nm | 50 nm | 40000 | 20000 | 50-100 nm silicon nitride or silicon carbide | 1000 μm x 1000 μm | 200-1500 eV |
2mm-2um-Au | Gold | 4-5 μm | 4 μm | 500 | 250 | 100-1000 nm silicon nitride or silicon carbide | 2 mm x 2 mm | 3-12 keV |
4 mm-2um-Au | Gold | 4-5 μm | 4 μm | 500 | 250 | 100-1000 nm silicon nitride or silicon carbide | 2 mm x 2 mm | 3-12 keV |
2 mm-4um-Au | Gold | 6-8 μm | 8 μm | 250 | 125 | silicon or membrane | 2 mm x 2 mm | 8-20 keV |